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I guess it sometimes has to do with how many creatures there can be at one time around you. Because the surface was riddled with creatures, and maybe, therefore the cave creatures never spawned.
It would've been great if they maybe can make the surface creatures not spawn when you're underground, if that's the case, and that would've make it easier to find those elusive critters.
Best place to hang out looking for underground creatures is probably a cave entrance created by a PoI's flattened area. Those seem to work well for whatever reason, and the quasi-underground underground critters will also spawn there.
We also walked to school in 10 feet of snow, uphill both ways, with no shoes and just string wrapped around our feet for socks, and we liked it! :-)
Give me underground any day!
Better ways to get nanites later.
'Rare' creatures are of course, as the name suggests, rare and hard to find. So you won't find them easily most of the time. So regardless of bugs or developers hiding them they shouldn't be just sitting there right in front of your ship once you land.
Second, 'rare' creatures are designed to sometimes be in some specific areas, more than what it tells you in the info. 'Underground' can mean a lot of things. It doesn't always mean caves. It can even mean the valleys between mountains. You should also try thinking outside of the box.
Also, sometimes you have to travel further than a couple of KM to find some of the fauna because they aren't going to be found in certain parts of the world. While the data will tell you that certain ones can only be found in the 'North' or 'South', others seem, at least to me, to only pop up in certain sections or combinations of terrain types. Such as, for example, the sort of terrains where a campsite/structure seems to be next to an open cave. You know those places where you can usually find lots of albumen pearls just sitting outside? You can often find a lot of very hard to find "rare underground" creatures there as well.
There used to be some bugs related to finding all of the fauna on planets, but they finally patched them all out. So... All in all if you're having trouble finding what you're looking for the problem is most likely that you're probably just not looking in the right places.