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https://www.reddit.com/r/SteamDeck/comments/t5qsr5/steam_deck_ps5_remote_play_works_great_with_chiaki/
https://flathub.org/apps/details/re.chiaki.Chiaki
That means you should be able to install it very easily on the Steam Deck via Discover Store in Desktop Mode
There is a decently straightforward guide to help pair it to your PS4/5 device, shouldn't be a challenge if you're tech-savvy.
Unfortunately I can't vouch for its performance (image/audio quality, lag, etc) because I don't own a Steam Deck (yet... Deckless country, sigh) and because I did have a poor experience trying Chiaki on a Google Chromecast 4 and on my Android Smartphone (though I suspect this says *very little* about how well it will encode/decode on the Deck)
Other than that, you could try running PS Remote via Bottles instead of Proton:
https://flathub.org/apps/details/com.usebottles.bottles
And you could fetch GE-Proton via ProtonUP-QT and try that 3rd-party version of Proton instead of the official ones:
https://flathub.org/apps/details/net.davidotek.pupgui2